TY  - GEN
AU  - Kim,Woo-Hee
AU  - Park,Sang-Joon
AU  - Son,Jong-Yeog
AU  - Kim,Hyungjun
TI  - Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition
SN  - 0957-4484
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1088/0957-4484/19/04/045302
ER  -