Kim, Woo-Hee <br/><br/>
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition.  [electronic resource] 

 -  Nanotechnology  Jan 2008 
 - 045302 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0957-4484 
<br/><br/><label>Standard No.: </label>10.1088/0957-4484/19/04/045302  doi