Brétagnol, Frédéric <br/><br/>
Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography.  [electronic resource] 

 -  Nanotechnology  Apr 2007 
 - 135303 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0957-4484 
<br/><br/><label>Standard No.: </label>10.1088/0957-4484/18/13/135303  doi