TY  - GEN
AU  - Liao,Bo-Huei
AU  - Lee,Cheng-Chung
TI  - Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets
SN  - 1094-4087
PY  - 2011///1014
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/OE.19.007507
ER  -