Liao, Bo-Huei <br/><br/>
Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets.  [electronic resource] 

 -  Optics express  Apr 2011 
 - 7507-12 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.19.007507  doi