TY - GEN AU - Filatova,E O AU - Peverini,L AU - Ziegler,E AU - Kozhevnikov,I V AU - Jonnard,P AU - André,J-M TI - Evolution of surface morphology at the early stage of Al2O3 film growth on a rough substrate SN - 1361-648X PY - 2011///1014 N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't UR - https://doi.org/10.1088/0953-8984/22/34/345003 ER -