TY - GEN AU - Růzek,Michal AU - Sedlák,Petr AU - Seiner,Hanus AU - Kruisová,Alena AU - Landa,Michal TI - Linearized forward and inverse problems of the resonant ultrasound spectroscopy for the evaluation of thin surface layers SN - 1520-8524 PY - 2011///0422 KW - Algorithms KW - Carbon KW - Elastic Modulus KW - Finite Element Analysis KW - Interferometry KW - Linear Models KW - Nonlinear Dynamics KW - Silicon KW - Spectrum Analysis KW - Ultrasonics KW - methods KW - Vibration N1 - Publication Type: Comparative Study; Journal Article UR - https://doi.org/10.1121/1.3500671 ER -