TY  - GEN
AU  - Peng,Ping
AU  - Shi,Tielin
AU  - Liao,Guanglan
AU  - Tang,Zirong
TI  - Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures
SN  - 1533-4880
PY  - 2010///1230
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2010.2858
ER  -