Peng, Ping <br/><br/>
Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures.  [electronic resource] 

 -  Journal of nanoscience and nanotechnology  Nov 2010 
 - 7287-90 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1533-4880 
<br/><br/><label>Standard No.: </label>10.1166/jnn.2010.2858  doi