TY  - GEN
AU  - Chen,Chao-Chang A
AU  - Chen,Jr-Rung
TI  - Nanopattern fabrication by tip plowing technology on 55 nm grating with stitching image method
SN  - 1533-4880
PY  - 2010///1223
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2010.2354
ER  -