TY  - GEN
AU  - Gale,D M
AU  - Pether,M I
AU  - Dainty,J C
TI  - Linnik microscope imaging of integrated circuit structures
SN  - 1559-128X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.35.000131
ER  -