Gale, D M <br/><br/>
Linnik microscope imaging of integrated circuit structures.  [electronic resource] 

 -  Applied optics  Jan 1996 
 - 131-48 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/AO.35.000131  doi