TY  - GEN
AU  - Stuerzebecher,Lorenz
AU  - Harzendorf,Torsten
AU  - Vogler,Uwe
AU  - Zeitner,Uwe D
AU  - Voelkel,Reinhard
TI  - Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
SN  - 1094-4087
PY  - 2011///0222
KW  - Equipment Design
KW  - Equipment Failure Analysis
KW  - Lighting
KW  - instrumentation
KW  - Photography
KW  - Refractometry
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OE.18.019485
ER  -