Stuerzebecher, Lorenz

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect. [electronic resource] - Optics express Sep 2010 - 19485-94 p. digital

Publication Type: Journal Article

1094-4087

10.1364/OE.18.019485 doi


Equipment Design
Equipment Failure Analysis
Lighting--instrumentation
Photography--instrumentation
Refractometry--instrumentation