Stuerzebecher, Lorenz
Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect. [electronic resource]
- Optics express Sep 2010
- 19485-94 p. digital
Publication Type: Journal Article
1094-4087
10.1364/OE.18.019485 doi
Equipment Design
Equipment Failure Analysis
Lighting--instrumentation
Photography--instrumentation
Refractometry--instrumentation