Fieguth, P W <br/><br/>
High-accuracy profiler that uses depth from focus.  [electronic resource] 

 -  Applied optics  Feb 1994 
 - 686-9 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/AO.33.000686  doi