TY  - GEN
AU  - Early,K
AU  - Tennant,D M
AU  - Jeon,D Y
AU  - Mulgrew,P P
AU  - Macdowell,A A
AU  - Wood Ii,O R
AU  - Kubiak,G D
AU  - Tichenor,D A
TI  - Characterization of AZ PN114 resist for soft-x-ray projection lithography
SN  - 1559-128X
PY  - 2013///0704
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.32.007044
ER  -