TY  - GEN
AU  - Attwood,D
AU  - Sommargren,G
AU  - Beguiristain,R
AU  - Nguyen,K
AU  - Bokor,J
AU  - Ceglio,N
AU  - Jackson,K
AU  - Koike,M
AU  - Underwood,J
TI  - Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography
SN  - 1559-128X
PY  - 2013///0704
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.32.007022
ER  -