TY  - GEN
AU  - Chow,R
AU  - Falabella,S
AU  - Loomis,G E
AU  - Rainer,F
AU  - Stolz,C J
AU  - Kozlowski,M R
TI  - Reactive evaporation of low-defect density hafnia
SN  - 1559-128X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.32.005567
ER  -