TY - GEN AU - Kim,JunHo TI - Nanoscale crystallization of phase change Ge2Sb2Te5 film with AFM lithography SN - 1932-8745 PY - 2011///0310 N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't UR - https://doi.org/10.1002/sca.20201 ER -