TY  - GEN
AU  - Bruno,F
AU  - Guidice,M D
AU  - Recca,R
AU  - Testa,F
TI  - Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength
SN  - 1559-128X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.30.004560
ER  -