Bruno, F <br/><br/>
Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength.  [electronic resource] 

 -  Applied optics  Nov 1991 
 - 4560-4 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/AO.30.004560  doi