TY  - GEN
AU  - Zhao,Zhi-Juan
AU  - Liu,Fen
AU  - Wang,Hai
AU  - Zhao,Liang-Zhong
AU  - Yan,Shou-Ke
AU  - Song,Xiao-Ping
TI  - [Thickness measurement of ultrathin SiO2 layer on Si by using XPS standard curve]
SN  - 1000-0593
PY  - 2015///0708
N1  - Publication Type: English Abstract; Journal Article
ER  -