Howells, M R <br/><br/>
Possibilities for projection x-ray lithography using holographic optical elements.  [electronic resource] 

 -  Applied optics  May 1991 
 - 1580-2 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/AO.30.001580  doi