TY  - GEN
AU  - Poodt,Paul
AU  - Lankhorst,Adriaan
AU  - Roozeboom,Fred
AU  - Spee,Karel
AU  - Maas,Diederik
AU  - Vermeer,Ad
TI  - High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation
SN  - 1521-4095
PY  - 2010///1207
KW  - Aluminum Oxide
KW  - chemistry
KW  - Electric Power Supplies
KW  - Silicon
KW  - Solar Energy
KW  - Surface Properties
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1002/adma.201000766
ER  -