Poodt, Paul <br/><br/>
High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation.  [electronic resource] 

 -  Advanced materials (Deerfield Beach, Fla.)  Aug 2010 
 - 3564-7 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1521-4095 
<br/><br/><label>Standard No.: </label>10.1002/adma.201000766  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Aluminum Oxide--chemistry<br/>Electric Power Supplies<br/>Silicon--chemistry<br/>Solar Energy<br/>Surface Properties