Hurwitz, M <br/><br/>
EUV efficiency of a 6000-grooves mm(-1) diffraction grating.  [electronic resource] 

 -  Applied optics  May 1990 
 - 1866-7 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1559-128X 
<br/><br/><label>Standard No.: </label>10.1364/AO.29.001866  doi