Yakshin, A E <br/><br/>
Properties of broadband depth-graded multilayer mirrors for EUV optical systems.  [electronic resource] 

 -  Optics express  Mar 2010 
 - 6957-71 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.18.006957  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Algorithms<br/>Equipment Design<br/>Models, Statistical<br/>Optical Devices<br/>Optics and Photonics<br/>Physics--methods<br/>Reproducibility of Results<br/>Scattering, Radiation<br/>Surface Properties<br/>Time Factors