TY  - GEN
AU  - Kawabe,M
AU  - Kanzaki,N
AU  - Masuda,K
AU  - Namba,S
TI  - Effects of ion etching on the properties of GaAs
SN  - 1559-128X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.17.002556
ER  -