TY  - GEN
AU  - Barker,D L
AU  - Loree,T R
TI  - Improved beam quality in double discharge excimer lasers
SN  - 1559-128X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.16.001792
ER  -