TY  - GEN
AU  - Milanov,Andrian P
AU  - Xu,Ke
AU  - Laha,Apurba
AU  - Bugiel,Eberhard
AU  - Ranjith,Ramadurai
AU  - Schwendt,Dominik
AU  - Osten,H Jörg
AU  - Parala,Harish
AU  - Fischer,Roland A
AU  - Devi,Anjana
TI  - Growth of crystalline Gd2O3 thin films with a high-quality interface on Si(100) by low-temperature H2O-assisted atomic layer deposition
SN  - 1520-5126
PY  - 2010///0301
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/ja909102j
ER  -