Milanov, Andrian P <br/><br/>
Growth of crystalline Gd2O3 thin films with a high-quality interface on Si(100) by low-temperature H2O-assisted atomic layer deposition.  [electronic resource] 

 -  Journal of the American Chemical Society  Jan 2010 
 - 36-7 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1520-5126 
<br/><br/><label>Standard No.: </label>10.1021/ja909102j  doi