Analysis of multilayered thin-film piezoelectric transducer arrays. [electronic resource]
- IEEE transactions on ultrasonics, ferroelectrics, and frequency control Nov 2009
- 2571-7 p. digital
Publication Type: Journal Article
1525-8955
10.1109/TUFFC.2009.1345 doi
Acoustics--instrumentation Computer-Aided Design Equipment Design Equipment Failure Analysis Membranes, Artificial Micro-Electrical-Mechanical Systems--instrumentation Reproducibility of Results Sensitivity and Specificity Transducers