TY  - GEN
AU  - Yang,Ki-Yeon
AU  - Kim,Jong-Woo
AU  - Byeon,Kyeong-Jae
AU  - Lee,Hee-Chul
AU  - Lee,Heon
TI  - Fabrication of 70 nm-sized zero residual polymer patterns by thermal nanoimprint lithography
SN  - 1533-4880
PY  - 2010///0105
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1166/jnn.2009.m30
ER  -