Yang, Ki-Yeon <br/><br/>
Fabrication of 70 nm-sized zero residual polymer patterns by thermal nanoimprint lithography.  [electronic resource] 

 -  Journal of nanoscience and nanotechnology  Jul 2009 
 - 4194-6 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1533-4880 
<br/><br/><label>Standard No.: </label>10.1166/jnn.2009.m30  doi