TY  - GEN
AU  - López-Camacho,E
AU  - Fernández,M
AU  - Gómez-Aleixandre,C
TI  - Influence of the atmosphere on the growth by CVD of silicon based nanostructures
SN  - 1533-4880
PY  - 2010///0105
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2009.m29
ER  -