TY  - GEN
AU  - Jahns,J
AU  - Däschner,W
TI  - Precise alignment through thick wafers using an optical copying techniquev
SN  - 0146-9592
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/ol.17.000390
ER  -