Jahns, J <br/><br/>
Precise alignment through thick wafers using an optical copying techniquev.  [electronic resource] 

 -  Optics letters  Mar 1992 
 - 390-2 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0146-9592 
<br/><br/><label>Standard No.: </label>10.1364/ol.17.000390  doi