TY  - GEN
AU  - Kim,Kyung Joong
AU  - Jang,Jong Shik
AU  - Lee,Joo-Hee
AU  - Jee,Yun-Jung
AU  - Jun,Chung-Sam
TI  - Determination of the absolute thickness of ultrathin Al2O3 overlayers on Si (100) substrate
SN  - 1520-6882
PY  - 2010///0118
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/ac901463m
ER  -