TY  - GEN
AU  - Ye,Sang-Heon
AU  - Kim,Soo Hyun
AU  - Kwak,Yoon Keun
AU  - Cho,Hyun Mo
AU  - Cho,Yong Jai
AU  - Chegal,Won
TI  - Angle-resolved annular data acquisition method for microellipsometry
SN  - 1094-4087
PY  - 2009///0724
KW  - Computer-Aided Design
KW  - Equipment Design
KW  - Equipment Failure Analysis
KW  - Materials Testing
KW  - instrumentation
KW  - Photometry
KW  - Refractometry
KW  - Reproducibility of Results
KW  - Sensitivity and Specificity
KW  - Systems Integration
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/oe.15.018056
ER  -