Ye, Sang-Heon <br/><br/>
Angle-resolved annular data acquisition method for microellipsometry.  [electronic resource] 

 -  Optics express  Dec 2007 
 - 18056-65 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/oe.15.018056  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Computer-Aided Design<br/>Equipment Design<br/>Equipment Failure Analysis<br/>Materials Testing--instrumentation<br/>Photometry--instrumentation<br/>Refractometry--instrumentation<br/>Reproducibility of Results<br/>Sensitivity and Specificity<br/>Systems Integration