TY  - GEN
AU  - Cheng,Qijin
AU  - Xu,Shuyan
AU  - Ostrikov,Kostya Ken
TI  - Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas
SN  - 1361-6528
PY  - 2009///0706
KW  - Crystallization
KW  - methods
KW  - Gases
KW  - chemistry
KW  - Hot Temperature
KW  - Macromolecular Substances
KW  - Materials Testing
KW  - Membranes, Artificial
KW  - Molecular Conformation
KW  - Nanostructures
KW  - Nanotechnology
KW  - Particle Size
KW  - Silicon
KW  - Surface Properties
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1088/0957-4484/20/21/215606
ER  -