Cheng, Qijin

Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas. [electronic resource] - Nanotechnology May 2009 - 215606 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1361-6528

10.1088/0957-4484/20/21/215606 doi


Crystallization--methods
Gases--chemistry
Hot Temperature
Macromolecular Substances--chemistry
Materials Testing
Membranes, Artificial
Molecular Conformation
Nanostructures--chemistry
Nanotechnology--methods
Particle Size
Silicon--chemistry
Surface Properties