Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas. [electronic resource]
- Nanotechnology May 2009
- 215606 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1361-6528
10.1088/0957-4484/20/21/215606 doi
Crystallization--methods Gases--chemistry Hot Temperature Macromolecular Substances--chemistry Materials Testing Membranes, Artificial Molecular Conformation Nanostructures--chemistry Nanotechnology--methods Particle Size Silicon--chemistry Surface Properties