TY  - GEN
AU  - Ghatnekar-Nilsson,S
AU  - Karlsson,I
AU  - Kvennefors,A
AU  - Luo,G
AU  - Zela,V
AU  - Arlelid,M
AU  - Parker,T
AU  - Montelius,L
AU  - Litwin,A
TI  - A new multifunctional platform based on high aspect ratio interdigitated NEMS structures
SN  - 1361-6528
PY  - 2009///0623
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1088/0957-4484/20/17/175502
ER  -