Pothiraja, Ramasamy <br/><br/>
Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films.  [electronic resource] 

 -  Dalton transactions (Cambridge, England : 2003)  Jan 2009 
 - 654-63 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1477-9226 
<br/><br/><label>Standard No.: </label>10.1039/b810528f  doi