Hall, Neal A <br/><br/>
Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation.  [electronic resource] 

 -  Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems  Feb 2008 
 - 37-44 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1057-7157 
<br/><br/><label>Standard No.: </label>10.1109/JMEMS.2007.910243  doi