Wi, Jung-Sub <br/><br/>
Fabrication of silicon nanopillar teradot arrays by electron-beam patterning for nanoimprint molds.  [electronic resource] 

 -  Small (Weinheim an der Bergstrasse, Germany)  Dec 2008 
 - 2118-22 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1613-6829 
<br/><br/><label>Standard No.: </label>10.1002/smll.200800625  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Hydrofluoric Acid--chemistry<br/>Microarray Analysis--instrumentation<br/>Microscopy, Electron, Scanning--methods<br/>Nanotechnology--methods<br/>Nanotubes--chemistry<br/>Particle Size<br/>Quaternary Ammonium Compounds--chemistry<br/>Silicon--chemistry