Myhajlenko, S <br/><br/>
SEM characterization of silicon nanostructures: can we meet the challenge?  [electronic resource] 

 -  Scanning   
 - 310-6 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0161-0457 
<br/><br/><label>Standard No.: </label>10.1002/sca.20115  doi