Tsai, Chien-Chung
High speed interferometric ellipsometer. [electronic resource]
- Optics express May 2008
- 7778-88 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/oe.16.007778 doi
Computer Simulation
Computer-Aided Design
Equipment Design
Equipment Failure Analysis
Interferometry--instrumentation
Models, Theoretical
Refractometry--instrumentation