Tsai, Chien-Chung

High speed interferometric ellipsometer. [electronic resource] - Optics express May 2008 - 7778-88 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1094-4087

10.1364/oe.16.007778 doi


Computer Simulation
Computer-Aided Design
Equipment Design
Equipment Failure Analysis
Interferometry--instrumentation
Models, Theoretical
Refractometry--instrumentation