TY  - GEN
AU  - Lee,Cheng-Chung
AU  - Liao,Bo-Huei
AU  - Liu,Ming-Chung
TI  - Developing new manufacturing methods for the improvement of AlF3 thin films
SN  - 1094-4087
PY  - 2008///1112
KW  - Aluminum Compounds
KW  - chemistry
KW  - Carbon Dioxide
KW  - Equipment Design
KW  - Fluorides
KW  - Ions
KW  - Magnetics
KW  - Materials Testing
KW  - methods
KW  - Motion Pictures
KW  - Nanostructures
KW  - Nanotechnology
KW  - Optics and Photonics
KW  - Oxygen
KW  - Quartz
KW  - Spectrophotometry
KW  - Surface Properties
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/oe.16.006904
ER  -