TY  - GEN
AU  - Ichihara,Chikara
AU  - Kawakami,Nobuyuki
AU  - Yasuno,Satoshi
AU  - Hino,Aya
AU  - Fujikawa,Kazuhisa
AU  - Kobayashi,Akira
AU  - Ochi,Mototaka
AU  - Gotoh,Hiroshi
AU  - Kugimiya,Toshihiro
TI  - Characterization of interface of Al-Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry
SN  - 0968-4328
PY  - 2009///0312
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1016/j.micron.2008.01.004
ER  -